OXFORD Plasmalab 133 RIE (FL) For Sale

Model Year: 2004
Quantity: 1
Condition: Complete system
Serial No: 417729
Availability: Immediate


This item can also be purchased via GCE's ebay sales agent: Oxford 133 RIE (FL) ebay listing

RIE set up for SiO2 Etch

330mm Platen

RF Power: 600W, 13.56MHz

Load lock with Turbo Pump

Water cooled electrode 10C-80C

Gas pod with 6 lines including following MFCs:
Ar      - 100sccm
N2     - 200sccm
CHF3 - 200sccm
NF3   - 200sccm
N2O  - 200sccm

Windows PC , user friendly interface


This tool was removed from production October 2014.

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