SPTS ASE HR ICP DRIE For Sale

Model Year:	2003
Quantity:	1
Condition:	Refurbished system
Serial No:	Available upon request
Availability:	SOLD

Configuration:

This item can also be purchased via GCE's ebay sales agent: SPTS DRIE ebay listing

Advanced Silicon Etch (ASE) with Bosch process

HR Chamber for High Rate Etch

Set up for 200mm wafer (100mm-200mm capable)

MACs Loader for Cassette to Cassette operation (2 load stations)

Electrostatic Chuck (ESC)
Electrogrip Electrostatic Driver, 4KV

Helium Backside Cooling (HBC)

RF Generators:
Advanced Energy LF5 380 KHZ, 500W
ENI ACG-3B 13.56MHZ, 300W
Advanced Energy RFG3001, 3KW

SOI capable
TTi TGP110: 10MHz Pulse Generator

Gas MFCs:
C4F8  300 SCCM
SF6    600 SCCM
N2      100 SCCM
AR     400 SCCM
CF4   200 SCCM

Turbo Pump: Leybold MAG 2000
Load Lock Pump: iQDP80
Chamber Pump: iQDP40-QMB250
Chiller: Tektemp TKD200/5118TL



 

Comments:

This SPTS / STS system is available for inspection at our facility in New Jersey.  System is being offered refurbished with operational demonstration at GCE.  Installation is available worldwide.