Canon Services and Consulting

GCE offers service and support for the following legacy Canon Steppers and Canon Scanners:

FPA 3000 i4, i5, i5+, i5++, iW, MR : I-line steppers
FPA 5500 iZ, iX, iZa : I-line steppers
FPA 3000 EX3, EX4, EX5, EX6 : DUV steppers
FPA 5000 ES3, ES4: DUV Scanners

This service offering includes:

  • Scheduled PM service
  • Emergency tool down service
  • On site FPA-3000 X-Y stage refurbishment (new magnets and airpads)
  • Stepper or Scanner relocation
  • User training
  • Maintanence training
  • Special development projects

All services are performed by our own technicians, NOT contractors. Our technicians are factory trained for maintenance and repair as well as highest level of technical support. 

Our stocked spare parts are refurbished, tested on running tools and are shipped with minimum of 3 month warranty.  OEM quality and delivery but without OEM pricing.  You can count on us to save you 25-50% from OEM pricing.  Some of the biggest Fabs already do.  More information can be found at: