Lithography

ImageManufacturerModelDescriptionQty
CANONFPA-2500 i3 StepperRes: 0.40um, Align: 100nm, Field: 20mm, i-Line5
CANONFPA-3000 EX4 DUV StepperRes: 0.25um, Align: 45nm, Field: 22mm1
CANONFPA-3000 EX5 DUV StepperRes: 0.22um, Align: 40nm, Field: 22mm6
CANONFPA-3000 i4 StepperRes: 0.35um, Align: 60nm, Field: 22mm, i-Line5
CANONFPA-3000 iW StepperRes: 0.8um, Align: 100nm, Field: 50mm, i-Line1
CANONY60-1095-R00 XY stage, i5 stepperRefurbished XY stage for Canon i5 stepper. Installation and support available worldwide.1
KARL SUSSMA/BA6 BSA Mask AlignerTSA/BSA, 1000W lamphouse 1
KARL SUSSMA150CC BSA Mask AlignerDetails coming soon1