Lithography
| Image | Manufacturer | Model | Description | Qty |
 | CANON | FPA-3000 EX5 DUV Stepper | Res: 0.22um, Align: 40nm, Field: 22mm | 1 |
 | CANON | FPA-3000 i4 Stepper | Res: 0.35um, Align: 60nm, Field: 22mm, i-Line | 1 |
68.JPG) | CANON | Y60-1095-R00 XY stage, i5 stepper | Refurbished XY stage for Canon i5 stepper | 1 |