CANON FPA-3000 EX5 DUV Stepper For Sale
Model Year: | 1998 |
Quantity: | 6 |
Condition: | Refurbished system |
Serial No: | 8095011; 8105015; 8105020, 8105021, 8105026, 8115031 |
Availability: | Immediate |
Configuration:
Majority of our EX5 steppers were under full service contract of CANON USA when running in production at a fab in Oregon, USA. Each has been well maintained by the OEM and hence, in excellent operational condition.
Wafer: 8" , 6" or 4" (for other sizes, please inquire)
Throughput: 85wph (60 shot) 22mm ( 8” Wafer)
Throughput: 110wph (32shot) 22mm ( 6” Wafer)
Reticle: 6" (Nikon Style or Canon Style reticle loader available)
General Specification and Information:
Model: FPA 3000 EX5 (Deep Ultra Violet)
First year available: 1998
Lens Type: ULEX25
Stage Type: FLAT (Fast Liner motor air guided Transfer stage)
Chamber Type: CD110
Projection Optics
Projection Magnification: 1/5 X
Exposure Light: (248nm DUV)
Numerical Aperture: (0.63~0.45 in 0.01 increments)
Field Size: 22x22 mm or 22x26 mm is optional
Standard Illumination
Exposure Light: DUV (Deep Ultra Violet)
Light Source KrF Excimer Laser CYMER/ELS-5300
Intensity: Min. 2800 w/m2
Uniformity: +/- 1.2%
Masking Blade Accuracy: Max. +/- 60 µm
Printing Performance
Resolution: <0.22µm or Less
Depth of Focus: Min. R 0.8µm
Image Surface Inclination: Min. R 0.25µm
Distortion: <±0.030µm
Focus/Leveling Performance
Focus Repeatability: <0.10µm (3sigma)
Leveling Repeatability: <6ppm (3sigma)
Minimum Compensation Range: >100ppm
Standard Stage Specification
Step Accuracy: <0.030µm (3sigma)
Scaling: <±0.5ppm
Orthogonality: <±0.5ppm
Standard Alignment Specification
Reticle Rotation Accuracy: <±.01µm
Wafer Alignment: <0.045µm mean + 3sigma
Reticle Rotation Repeatability: <R0.02µm)
Reticle:
Standard Size: 6" square t=0.25" ( Particle checker)
Material: Quartz
Pattern Material: 2 layer CR, 3 Layer CR
Pellicle Frame: Pattern Side only Stand Off= 6.3mm
Reticle Particle Checker Specification
Detection Resolution:
Pattern Surface: >0.6µm
Glass Surface:- >15µm
Pellicle Surface: >20µm
Detection Repeatability: >95%
Environmental Chamber Specification
Cleanness: Class 1(>0.1µm)
Chamber Specifications:
Chamber Type: CD110
Air Conditioner: Y77-0615 (CC159XD0)
Refrigerant: R407C
Gram (g): 4000
Pounds (lbs): 8.819
Comments:
We are offering total turnkey solution which includes:
- Full refurbishment
- Full operational demo at our facility (compliance to original specs will be demonstrated)
- Training at GCE facility
- Installation and training at customer's facility
- 3 months parts and labor warranty worldwide
- Extended warranty available for upto full year (optional)
Refurbishment lead time is estimated at 3 months.
We welcome discussions for customization to meet your specific needs. We are also offering TEL ACT 8, Single Block, DUV, Coater/Developer from our stock. Turn-key Stepper/Track package can be quoted at very attractive price.
Parts Available For CANON FPA-3000 EX5 DUV Stepper
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This product is located at our USA - West Coast facility.