AIXTRON 2800 G4 GaN MOCVD For Sale

Model Year:	2010
Quantity:	1
Condition:	Complete system
Serial No:	Available upon request
Availability:	SOLD

Configuration:

This reactor is available for purchase directly from the EU Fab.
It has been powered down but still in clean room.  Not possible to do power on inspection.

Aixtron 2800 G4 GaN MOCVD reactor
Throughput: 6 x 6" wafers
SN 701159 , Year of Manufacture 2010
Hard Drive removed by the user for proprietory reasons.  New drive with software estimated to cost $10K - $15K
Software: AixAct 6.1.6.8 (no longer present)

Configuration details:
MO Lines:  12 possible with 7 Active - TMGa, TMAl, TMIn, TEOS, CBr4, Cp2Mg, TEGa incl. MFC/PC etc
Dopant Lines: Double Dilution
Insitu: Laytec EpiTT

Purifiers:
H2     - Entegris 2.8L
N2     - Entegris 2.8L
NH3  - Entegris 2.8L

MFC manufacturer:  Bronkhorst
 
Pumps:   
Process Pump: Ebara A70W
Glovebox Pump: Varian Triscroll 300
Door Pump: Varian Triscroll 300

Spare parts included:
tension disc *D169.1xt15* 6 x 6" (100001647)
cover segment, inner ring 6 x 6", Ra6-9 (100173962)
supporting ring, complete D187.1 t15 single r (100141599)
plate set 1 x 6, G4 55µm (41040468)
cover segment outer w/o mark 6 x 6" G4 (100001651)
cover segment outer with mark 6 x 6" G4 (100001650)
disc, planet 6 x 6", D520, t19, single rot. (100143066)
ceiling, G4HT, QTZ, D560 x t2.4, 2 hole,unbe (100087158)
6-er plate set 1X6" E062.5205.90.-02
star 6x6", RA 6-8 µm, quartz glass

 

Comments:

GCE is re-marketing this reactor on behalf of our end user customer.  Source inspection can be arranged upon request