CDSEM & SEM
| Image | Manufacturer | Model | Description | Qty |
 | KLA-Tencor | 8100 CD-SEM | Res: 4.5nm, Features: 100nm, 3"-8" wafers, Mag: 400kx | 3 |
 | KLA-Tencor | 8100XP CD-SEM | Res: 4nm, Features: 30nm, 3"-8" wafers, Mag: 400kx | 3 |
 | KLA-Tencor | 8100XPR CD-SEM | Res: 4nm, Features: 30nm, 5"-6" reticles, 3"-8" wafers, Mag: 400kx | 2 |
 | KLA-Tencor | 8250 CD-SEM | Res: 4nm, Features: 30nm, 3"-8" wafers, Mag: 400kx | 2 |