CDSEM & SEM

ImageManufacturerModelDescriptionQty
KLA-Tencor8100 CD-SEMRes: 4.5nm, Features: 100nm, 3"-8" wafers, Mag: 400kx3
KLA-Tencor8100XP CD-SEMRes: 4nm, Features: 30nm, 3"-8" wafers, Mag: 400kx3
KLA-Tencor8100XPR CD-SEMRes: 4nm, Features: 30nm, 5"-6" reticles, 3"-8" wafers, Mag: 400kx2
KLA-Tencor8250 CD-SEMRes: 4nm, Features: 30nm, 3"-8" wafers, Mag: 400kx2
KLA-TencoreCD2 CD-SEMRes: 2.8nm, 8" wafers, 55 wafers/hr1