Lithography

ImageManufacturerModelDescriptionQty
CANONFPA-3000 EX5 DUV StepperRes: 0.22um, Align: 40nm, Field: 22mm2
CANONFPA-3000 i4 StepperRes: 0.35um, Align: 60nm, Field: 22mm, i-Line1
CANONY60-1095-R00 XY stage, i5 stepperRefurbished XY stage for Canon i5 stepper1