Lithography

ImageManufacturerModelDescriptionQty
CANONFPA-3000 EX5 DUV StepperRes: 0.22um, Align: 40nm, Field: 22mm1
CANONY60-1095-R00 XY stage, i5 stepperRefurbished XY stage for Canon i5 stepper1
CYMERELS-5300 Excimer Laser (248 nm)248nm KrF light Source for DUV Steppers1