CANON BG4-5421-000 For Sale
| Description: | Piezo Unit |
|---|---|
| Condition: | Refurbished, Calibrated, Tested |
| Warranty: | 3 months |
| Delivery: | Ready to Ship |
| Quantity: | 1 |
| Suitable for: | FPA-3000 EX3 DUV Stepper, FPA-3000 i4 Stepper, FPA-3000 iW Stepper, FPA-3000 MR Stepper |
Comments
The piezo assembly is fully refurbished with new piezo motor
Fully tested on one of our FPA-3000 Steppers
Related Equipment For Sale
Recently Sold Equipment
- CANON FPA-2500 i3 Stepper
- CANON FPA-3000 EX3 DUV Stepper
- CANON FPA-3000 EX4 DUV Stepper
- CANON FPA-3000 EX6 DUV Stepper
- CANON FPA-3000 i5 Stepper
- CANON FPA-3000 i5 Stepper
- CANON FPA-3000 i5+ Stepper
- CANON FPA-3000 i5++ Stepper
- CANON FPA-3000 iW Stepper
- CANON FPA-3000 MR Stepper
- CANON FPA-5000 ES3 DUV Scanner
- CANON FPA5000 ES2 DUV Scanner
- CANON Spare Parts
-
1 In Stock -
tell a friend -
print
Related Parts For Sale
- BG3-1041-000 RT-CPU
- BG3-1045-000 REF-MEM(RT)
- BG3-1050-000 CAP4 PCB
- BG3-1360-000 ROBOT CONTROLLER
- BG3-1405-000 Main CPU
- BG3-1406-000 REF MEM
- BG3-1407-000 IP PCB
- BG3-2090-000 M-POS PCB
- BG3-2098-000 MAIN ADAPTER PCB
- BG3-2099-000 CD I/F PCB
- BG3-2189-000 DAMPER-CD3 PCB
- BG3-2247-000 Color Monitor
- BG3-2462-000 Main CPU
- BG3-2575-000 M-Stopper Switching Unit
- BG3-2649-000 CAP5 PCB
- BG3-2898-000 Masking Blade
- BG3-3074-000 AC/DC Power Supply (E-Box)
- BG3-3089 STG CD2 PCB
- BG3-3424-000 Distribution PCB
- BG3-3521 FZANA
- BG3-3526 FTG DSP
- BG3-3607-000 HL(M) IF PCB ASS'Y
- BG3-3608-000 HL(S) IF PCB ASS'Y
- BG3-3822-000 DMP-PRE
- BG3-3823-000 DMP-DSP
- BG3-3824-000 AM2
- BG3-3825-000 MLE-IF
- BG3-3827-000 MB (XY)
- BG3-3828-000 MB (R)
- BG3-3829-000 MB (Z)
- BG3-3830-000 IO DSP
- BG3-3831-000 RT DSP
- BG3-3832-000 CDIF4
- BG3-3833-000 STG-PRE
- BG3-3842-000 Power Supply
- BG3-3843-000 Power Supply
- BG3-3844-000 Power Supply
- BG3-3845-000 Power Supply
- BG3-3846-000 Power Supply
- BG3-3853-000 Power Supply
- BG3-3854-000 Power Supply
- BG3-3857-000 Power Supply
- BG3-3858-000 UPS Unit, GSEE
- BG3-3860-000 Power Supply
- BG3-3861-000 DCON PCB
- BG3-3862-000 DCON2
- BG3-3863-000 D-LED PCB
- BG3-3864-000 Power Supply
- BG3-3865-000 Power Supply
- BG3-3866-000 PDU
- BG3-3869 MBX,CD POB
- BG3-3876-000 WQD
- BG3-3878-000 POD
- BG3-3879-000 WSZ1MD
- BG3-3880-000 SVMVD
- BG3-3881-000 MBYD
- BG3-3888-000 PM-A (5V/20A)
- BG3-3889-000 PM-B (15V/10A)
- BG3-3890-000 PM-B (15V/10A)
- BG3-5181-000 EALS-PCB
- BG3-5450-000 Exposure Shutter Unit
- BG3-5526-000 Main CAM
- BG3-5527-000 RT CAM
- BG3-5584-000 Power Supply
- BG3-6113-000 WXD
- BG3-6114-000 RYRD
- BG3-6115-000 RYRD
- BG3-6116-000 CFRD
- BG3-6320-000 ECI2-PCB
- BG3-6705-000 AC/DC Power Supply (D-Rack)
- BG3-7671 DRIVE UNIT
- BG3-7743 IP 2
- BG3-7744 HRD 2
- BG3-7795 EAL/ES3
- BG3-8326 MB (WX)
- BG4-2035-000 IPIF-III
- BG4-2102-000 TTL AF CPU
- BG4-2420-000 COM RL
- BG4-2765-000 OPTF CPU
- BG4-2766-000 CCD OPTF CAP
- BG4-3986 CD 90-CD
- BG4-4078-000 AF CPU
- BG4-4275-000 MAIN CPU
- BG4-4276-000 TV CPU
- BG4-4390-000 SYNC DET AMP PCB
- BG4-4397-000 RFC MV DRIVE PCB
- BG4-4429-000 PROCESSING 1 PCB
- BG4-4430-000 PROCESSING 2 PCB
- BG4-4432-001 CONTROLLER 2 PCB
- BG4-4433-002 CONTROLLER 3 PCB
- BG4-4570 WET CD
- BG4-4649-000 P-CON
- BG4-5372-000 Laser Head
- BG4-5724-000 ROBOT CONTROLLER
- BG4-5728-000 RS PCB
- BG4-5733-000 LIBRARY SUB PCB
- BG4-5768-000 TCVIF II
- BG4-6079-000 RPC CPU PCB
- BG4-6405-000 BASIS PCB
- BG4-6456-000 STAGE DSP PCB ASS'Y
- BG4-6457-000 XY STAGE PRE-AMP PCB ASS'Y
- BG4-6459-000 OFCD-IF PCB ASS'Y
- BG4-6465-000 MEASUREMENT PCB (X) ASS'Y
- BG4-6466-000 MEASUREMENT PCB (Y) ASS'Y
- BG4-6467-000 MEASUREMENT PCB (THETA) ASS'Y
- BG4-6579-000 MV CD PCB
- BG4-6601-000 AC/DC Power Supply (D-Rack)
- BG4-6616-000 I.L UNIFORMITY PRE AMP PCB
- BG4-6626-000 MAIN CPU PCB ASS'Y
- BG4-6629-000 XY STAGE CPU PCB ASS'Y
- BG4-6631-000 CD I/F PCB ASS'Y
- BG4-6634-000 BACK PLANE PCB (VME) ASS'Y
- BG4-6634-000 D-Rack Backplane PCB
- BG4-6673-000 HROA CD PCB
- BG4-6686-000 Mirror Switching Unit
- BG4-6699-000 Exposure Shutter Unit
- BG4-6703-000 Masking Blade
- BG4-6745-000 RC CPU PCB
- BG4-6746-000 WF/RC IF PCB
- BG4-6755-000 SH PCB
- BG4-6764-000 3” - 4” Finger
- BG4-6765-000 5” – 8” Finger
- BG4-6777-000 Feed Hand Unit (Type 6 L)
- BG4-6783-000 WF SCH/PS PCB
- BG4-6786-000 WF LD/PD PCB
- BG4-6794-000 WF SCH/EL PCB
- BG4-6811-000 PA/SH PCB
- BG4-6818-000 CCD-DRV-PCB
- BG4-6823-000 WF CPU PCB
- BG4-6856-000 Pellicle Particle Checker
- BG4-6902-000 ASCD (L) PCB
- BG4-6903-000 ASCD (R) PCB
- BG4-6923-000 AF SNS PCB
- BG4-6928-000 URS CD PCB
- BG4-6973-000 AC/DC Power Supply (E-Box)
- BG4-6974-000 E-CD PCB
- BG4-7082-000 Lamp power supply
- BG4-7329-000 PPC PCB
- BG4-7432-000 CONTROLLER 1 PCB
- BG4-7518-000 Feed Hand Unit (Type 6 R)
- BG4-7840-000 MOTOR PCB
- BG4-7936-000 IL PRE-AMP PCB
- BG4-7937-000 CAP2 PCB
- BG4-7938-000 HROA-CD(W) PCB
- BG4-7964-000 A STOP PCB
- BG4-8140-000 2CH PAE- PROCESSING PCB
- BG4-8141-000 2CH PAE- PROCESSING PCB
- BG4-8192-000 INTERMEDIATE LIBRARY CONTROL
- BG4-8193-000 LIBRARY ELEVATOR CONT PCB
- BG4-8194-000 LIBRARY SUB PCB
- BG4-8546-000 IL3-CD PCB
- BG4-8591-000 EASLCD PCB
- BG4-8592-000 EASRCD PCB
- BG4-8616-000 A-AMP PCB
- BG4-8680-000 EXPO-CD PCB
- BG4-8705-000 MV-CD PCB
- BG4-8815-000 CDIF2 PCB
- BG4-8835-000 URS-CD PCB
- BG4-9151-000 FZANA IF PCB
- BG4-9152-000 X-Y STAGE PIPING PCB
- BG4-9171-000 AC/DC Power Supply (D-Rack)
- BG4-9175-000 MLE-I/F PCB
- BG4-9191-000 XY PRE-AMP2 PCB
- BG4-9218-000 MLE INTERMEDIATE PCB ASS'Y
- BG4-9307-000 CAP3 PCB
- BG4-9716-000 IMP 3a
- BG4-9745-000 OFCD-I/F PCB
- BG5-0009 MB (WLC)
- BG5-0012 DCON 1
- BG5-0013 DCON 2
- BG5-0015 RT CPU
- BG5-0020 Power Supply
- BG5-0024 Power Supply
- BG5-0025 DRIVE UNIT
- BG5-0026 DRIVE UNIT
- BG5-0027 DRIVE UNIT
- BG5-0050 HUB UNIT
- BG5-0060 MAIN CAM
- BG5-0174 PA/SH PCB
- BG5-0419 SCH Robot Unit (Right)
- BG5-0429 AIN3
- BG5-0430 CDIF5
- BG5-1212 Power Supply
- BG5-1255 WF-IF
- BG5-1262 MLE/IF 2
- BG5-1518 CAP7 PCB
- BG5-1889 Power Supply
- BG5-1890 REF-MEM(MAIN)
- BG5-2508 DRIVE UNIT
- BG5-2510 DRIVE UNIT
- BG5-2511 DRIVE UNIT
- BG5-3342 ECIA 2
- BG8-2252-000 ADP-II
- BG8-2675 E-CD
- BG8-3363-000 IMP-II(A-B)
- BG8-3369 EXP-CD
- BG8-3607-000 MBX-CD
- BG9-3500-000 ADP-2 PCB
- BG9-3501-000 IMP-2 I/F PCB
- BG9-3502-000 ACC-1
- BG9-4085-000 ACC-1
- BH5-3553-000 AC/DC Power Supply (D-Rack)