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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
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Spare Parts Catalog

Find the part — search by equipment, condition, and availability.

A comprehensive spare-parts inventory for Canon FPA-3000 wafer steppers and KLA CD-SEMs. Search by your model to see compatible parts, in stock or available to source.

 
Thank you! Your submission has been received!
Oops! Something went wrong while submitting the form.

Filter systems

Clear
Compatibility
Offering Type
Condition
Thank you! Your submission has been received!
Oops! Something went wrong while submitting the form.
0 systems
Canon 610 Test Reticle
Ready to Ship
Serviced by GCE

Canon 610 Test Reticle

Test/Calibration Reticle, 5X

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon 735 Test Reticle
Ready to Ship
Serviced by GCE

Canon 735 Test Reticle

Focus/Resolution Reticle, 5X

Compatibility
Canon FPA-3000
Condition
New
View Part
Canon Bar Code Reader
Ready to Ship
Serviced by GCE

Canon Bar Code Reader

Bar Code Reader for Reticle Cassette

Compatibility
Canon FPA-3000
Condition
New
View Part
Canon BF6-2580
Ready to Ship
Serviced by GCE

Canon BF6-2580

FRA cable

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BF6-3467
Ready to Ship
Serviced by GCE

Canon BF6-3467

End Effector, 3in-4in

Compatibility
Canon FPA-3000
Condition
New
View Part
Canon BG3-1045
Ready to Ship
Serviced by GCE

Canon BG3-1045

Ref-Mem(RT) PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-1050
Ready to Ship
Serviced by GCE

Canon BG3-1050

CAP4 PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-1360
Ready to Ship
Serviced by GCE

Canon BG3-1360

Robot Controller PCB for RC

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-1406
Ready to Ship
Serviced by GCE

Canon BG3-1406

REF-MEM PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part
Canon BG3-1407
Ready to Ship
Serviced by GCE

Canon BG3-1407

Image Processing PCB

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG3-2090
Ready to Ship
Serviced by GCE

Canon BG3-2090

M-POS PCB-3 Assembly

Compatibility
Canon FPA-3000
Condition
Refurbished, fully tested, and on-tool verified
View Part
Canon BG3-2098
Ready to Ship
Serviced by GCE

Canon BG3-2098

Main Adopter PCB Assembly

Compatibility
Canon FPA-3000
Condition
Removed from working system
View Part

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