CANON FPA-3000 EX6 DUV Stepper For Sale
| Model Year: | N/A |
| Quantity: | 1 |
| Condition: | Good operational condition |
| Serial No: | Available upon request |
| Availability: | SOLD |
Configuration:
- Reticle:- 6" Square
- Wafer: 6" or 8" (for other size, please inquire)
General Specification and Information:
- Model: FPA 3000 EX6 (Deep Ultra Violet)
- First year available: 1999
- Lens Type: ULEX26
- Stage Type: FLAT (Fast Liner motor air guided Transfer stage)
- Chamber Type: CD111(SMIF)
Projection Optics:
- Projection Magnification: 1/5 X
- Exposure Light: (248nm DUV)
- Numerical Aperture: (0.65~0.50 in 0.01 increments)
- Field Size: 22x22mm or 22x26mm is optional
Standard Illumination:
- Exposure Light: DUV (Deep Ultra Violet)
- Light Source: KrF Excimer Laser CYMER/ELS-5300 or KLESG10K-30
- Intensity: Min. 3500 w/m2
- Uniformity: +/- 1.2%
- Masking Blade Accuracy: Max. +/- 80 µm
Printing Performance:
- Resolution: <0.22µm or Less
- Depth of Focus: Min. R 0.8µm
- Image Surface Inclination: Min. R 0.25µm
- Distortion: <±0.030µm
Focus/Leveling Performance:
- Focus Repeatability: <0.10µm (3sigma)
- Leveling Repeatability: <6ppm (3sigma)
- Minimum Compensation Range >100ppm
Standard Stage Specification:
- Step Accuracy: <0.030µm (3sigma)
- Scaling: <±0.5ppm
- Orthogonality: <±0.5ppm
Standard Alignment Specification:
- Reticle Rotation Accuracy: <±.01µm
- Wafer Alignment: <0.045µm mean + 3sigma
- Reticle Rotation Repeatability: <R0.02µm)
Reticle:
- Standard Size: 6" square t=0.25" (Patticle checker)
- Material: Quartz
- Pattern Material: 2 layer CR, 3 Layer CR
- Pellicle Frame: Pattern Side only Stand Off= 6.3mm
Reticle Particle Checker Specification:
Detection Resolution:
- Pattern Surface: >0.6µm
- Glass Surface: 15µm
- Pellicle Surface:- >20µm
Detection Repeatability: >95%
- Wafer: Size:-Standard 8” ( 6” thru 8” SEMI Standard, JEIDA,Notch / Flat, Optional)
- Throughput: 90wph (60 shot)22mm ( 8” Wafer)
- Throughput: 120wph (32shot)22mm ( 6” Wafer)
Environmental Chamber Specification:
- Cleanness: Class 1(>0.1µm)
Chamber Specifications:
- Chamber Type: CD111 (SMIF)
- Air Conditioner: Y77
- Refrigerant: R407C
- Gram (g): 3500
- Pounds (lbs): 7.716
Comments:
This Canon EX6 stepper is being offered fully refurbished with installation and 3 months parts and labor warranty worldwide. Refurbishment lead time is estimated at 3 months. Full operational demo for buy off at our facility. We are also offering TEL ACT 8, Single Block, DUV, Coater/Developer from our stock. Turn-key Stepper/Track package can be quoted at very attractive price.
Plese contact us to discuss this, if you have near term or long term need.
