CANON FPA-3000 i5 Stepper For Sale
| Model Year: | 1998 |
| Quantity: | 1 |
| Condition: | Good operational condition |
| Serial No: | Available upon request |
| Availability: | SOLD |
Configuration:
- Wafer: 6" or 8" (for other size, please inquire)
- Reticle: 6"
General Specification and Information:
- Model: FPA 3000 i5
- First year available: 1996
- Lens Type: UL34-II
- Stage Type: FLAT
- Chamber Type: CD83
Projection Optics:
- Projection Magnification: 1/5 X
- Exposure Light: 365nm
- Numerical Aperture: .45 -.63
- Field Size: 22x22 (or 17x26)
Standard Illumination:
- Light Source: 2.0KW Super High Pressure Hg Lamp
- Intensity: 8000 W/m2
- Uniformity: < 1.0%
- Focus/Leveling Repeatability: <0.10µm (3sigma)
Standard Performance:
- Resolution: <0.35µm
- Depth of Focus: >1.0µm
- Image Field Deviation: <.3µm
- Distortion: <±0.035µm
Standard Stage Specification:
- Step Accuracy: <0.03µm (3sigma)
- Scaling: <±0.5ppm
- Orthogonality: <±0.5ppm
Standard Alignment Specification:
- Reticle Rotation Accuracy: <±0.01µm
- Wafer Alignment: <0.04µm mean + 3sigma
- Reticle Rotation Repeatability: <0.02µm)
Standard Leveling:
- Leveling Repeatability: <7ppm (3sigma)
- Minimum Compensation Range: >100ppm
- Reticle: Standard Size 6" square t=0.25" ( Patticle checker)
- Wafer Size: Standard 8” ( 6” thru 8” SEMI Standard, Notch / Flat )
- Throughput: 74wph (60 shot)90mj/cm ( 8” Wafer)
Chamber Specifications:
- Chamber Type: CD83
- Air Conditioner: Y75-4105-000
- Refrigerant: R22
- Gram (g): 5000
- Pounds (lbs): 11.02
Comments:
This Canon i5 stepper is being offered fully refurbished with installation and 3 months parts and labor warranty worldwide. Refurbishment lead time is estimated at 3-4 months. Full operational demo for buy off at our facility. We are also offering TEL ACT 8, Single Block, i-line, Coater/Developer from our stock. Turn-key Stepper/Track package can be quoted at very attractive price.
Please contact us to discuss this, if you have near term or long-term need.
