CANON FPA-5000 ES3 DUV Scanner For Sale

Model Year: N/A
Quantity: 1
Condition: Complete system
Serial No: Available upon request
Availability: SOLD

Configuration:

  • Reticle:- 6" Square
  • Wafer: 8" or 12"
     

 

 

General Specification and Information:

  • Model: FPA 5000 ES3 (Deep Ultra Violet)
  • First year available:  2001
  • Lens Type:  ULEX03S
  • Stage Type:  FLAT-II (Fast Liner motor air guided Transfer stage)
  • Chamber Type:  CD140
     

 

Projection Optics:

  • Projection Magnification:  1/4 X
  • Exposure Light:  (248nm DUV)
  • Numerical Aperture:  (0.73~0.60 in 0.01 increments)
  • Field Size:  26x33mm
     

Standard Illumination:

  • Exposeure Light:  DUV (Deep Ultra Violet)
  • Light Source:  KrF Excimer Laser CYMER/ELS-6300 or KLES G20K
  • Intensity:  Min. 17,000 w/m2
  • Uniformity:  +/- 1.0%
  • Masking Blade Accuracy:  Max. +/- 80 µm
     

Printing Performance:

  • Resolution:  <0.13µm or Less
  • Depth of Focus:  Min. R 0.6µm
  • Image Surface Width:  R 0.12µm or Better
  • Distortion:  <± 10µm
     

Focus/Leveling Performance:

  • Focus Repeatability:  <60nm (3sigma)
  • Leveling Repeatability:  <4ppm (3sigma)
  • Minimum Compensation Range:  >100ppm
     

Standard Stage Specification:

  • Step Accuracy:  17nm (3sigma)
  • Scaling:  <±0.5ppm
  • Orthogonality:  <±0.5ppm
     

Standard Alignment Specification:

  • Reticle Rotation Accuracy:  <±0.3ppm
  • Wafer Alignment:  <0.025µm mean + 3sigma
  • Reticle Rotation Repeatability:  <R0.7ppm
     

Reticle:

  • Standard Size:  6" square t=0.25" ( Patticle checker)
  • Material:  Quartz
  • Pattern Material:  2 layer CR, 3 Layer CR
  • Pellicle Frame:  Pattern Side only Stand Off= 6.3mm 

Reticle Particle Checker Specification:

Detection Resolution:

  • Pattern Surface:  >0.6µm
  • Glass Surface:  >15µm
  • Pellicle Surface:  >20µm
     

Detection Repeatability:  >95%

  • Wafer Size:  Standard 8” ( 8” thru 12” SEMI Standard, JEIDA,Notch / Flat, Optional)
  • Throughput:  125wph (30 shot)22mm ( 8” Wafer)
  • Throughput:  73wph (64shot)22mm ( 12” Wafer)
     

Environmental Chamber Specification:

  • Cleanness:  Class 1(>0.1µm)
  • Temperature Control Accuracy:  within+/- 0.1*C

Chamber Specifications:

  • Chamber Type:  CD140
  • Air Conditioner:  BCU-900
  • Refrigerant:  P3419481YH
  • Conditioner:  SC-216440

 

 

 


Comments:

  • This CANON FPA-5000ES3 DUV SCANNER is being offered in as-is condition
  • It may be possible to arrange operational inspection
  • Professional decommissioning services are available


Please contact us to discuss this, if you have near term or long term need.
 



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