HITACHI S-8840 CDSEM For Sale

Model Year:	N/A
Quantity:	1
Condition:	Refurbished system
Serial No:	Available upon request
Availability:	SOLD

Configuration:

Performance Specification:
• Feature Size:  < 130 nm
• Resolution:    < 6 nm
• Electron Source: Schottky, Thermal Field Emitter
• Magnification: 1 kX - 150 kX
• Stage: stepping motor driven with linear encoder
• Accelerating Voltage:  0.5kV - 1.3kV
• Throughput:  upto 26 wafers/hr
 
Configured as follows:
• Wafer size:  4” – 8” (Silicon, GaAs, or other)
• Unix based operating system
• 2 wafer loading stations
• Shottkey Electron Source
• Chamber pump
• Load lock pump

Comments:

Our turnkey offering includes the following:
• The system is guaranteed to be in full compliance with original specs 
• Full demonstration for pre-shipment acceptance at GCE facility
• Installation, start up, and training at customer's facility worldwide
• 3 month parts and labor warranty  (6 and 12 month warranty can be quoted) 
• Unlimited support by email and phone calls