KLA-Tencor 5100XP Overlay For Sale
|Serial No:||Available upon request|
The KLA-Tencor 5100 XP system is a metrology tool which performs Overlay (misregistration), CD (optional), and Height measurements(optional) automatically on thin film semiconductor wafers. Measurements are made in three dimensions based on the Coherence Probe Metrology (CPM) technology.
System Consists of the Following:
- Inspection Station: Performs all wafer handling and measurement. Houses optical system, autoloader, stage, and power supplies.
- Control Console: Houses monitors and User Interface computers that allow the operator to control the system.
- System computer: Windows NT operating .
- Other: video printer, SCSI backup unit, laser printer (optional), and thermal mini-printer (optional).
- 12k and 750 micron FOV optical microscopes with light source. Used for alignment and wide-field viewing.
- 50 micron FOV microscope performs optical measurement, interferometer measurement, and autofocus.
- Standard cassette loading
- 2 cassette stations, pre-aligner, and robotic handler.
- Can be configured for 4,5,6, or 8 inch wafers in these configurations:
- Single Wafer size: both cassettes are configured for a single size of wafer for fully automated operation.
- Dual Wafer size: each cassette is configured for a different size wafer for fully automated operation.
Precision (Dynamic repeatability): less than 4nm
Long Term Repeatability: less than 4nm
- Throughput: 95 wafers/ hour using a standard recipe
- Autoloader throughput: greater than 1000 wafers per hour
- Recipe portability: Yes (move recipes between tools)
- Overlay Matching: 7.0nm (measurement on one tool vs same measurement on another tool)
- CD Measurement: A software CD measurement option is available to perform optical CD measurements with the system. (one or more of our systems have this option factory installed)
- Non-contact height measurement: A software option is available to perform non-contact height measurements using the Coherence Probe microscope. (one or more of our systems may have this option factory installed)
We also have:
- 4 ea. of KLA 5200XP in stock. For details, please see the following link at our website: KLA-Tencor 5200XP Overlay
- 1 ea. of KLA 5300 in stock. For details, please see the following link at our website: KLA-Tencor 5300 Overlay
Refurbished system. Inspection and Demonstration at our facility. Installation and training is available.