KLA-Tencor 6200 Surfscan For Sale

Model Year: 1996
Quantity: 1
Condition: Refurbished system
Serial No: Available upon request
Availability: SOLD


Fully Automated Cassette to Cassette

Wafer size: 100,125,150,200mm

Sensitivity: 0.09µm @ 80% capture rate

Repeatability: less than 1.0% at 1 of 0.204 diameter latex spheres on bare silicon

Illumination source is 30mW Argon-Ion laser, 488 wavelength

Contamination: less than 0.005 particles/cm² greater than 0.15µm

Haze Sensitivity: 0.02ppm³


System is confirmed fully operational at our facility.  We can also provide it fully refurbished with new laser and full calibration.  Details of full refurbishment can be provided upon request.

It is available for inspection at our facility in Blackwood, NJ USA.
Installation and training available worldwide at additional cost. All services performed by very senior technicians with many years of OEM experience.

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