KLA-Tencor 6200 Surfscan For Sale
|Serial No:||Available upon request|
Fully Automated Cassette to Cassette
Wafer size: 100,125,150,200mm
Sensitivity: 0.09µm @ 80% capture rate
Repeatability: less than 1.0% at 1 of 0.204 diameter latex spheres on bare silicon
Illumination source is 30mW Argon-Ion laser, 488 wavelength
Contamination: less than 0.005 particles/cm² greater than 0.15µm
Haze Sensitivity: 0.02ppm³
System is confirmed fully operational at our facility. We can also provide it fully refurbished with new laser and full calibration. Details of full refurbishment can be provided upon request.
It is available for inspection at our facility in Blackwood, NJ USA.
Installation and training available worldwide at additional cost. All services performed by very senior technicians with many years of OEM experience.