OXFORD Plasmalab 133 RIE (CL) For Sale

Model Year: 2004
Quantity: 1
Condition: Complete system
Serial No: Available upon request
Availability: SOLD

Configuration:


RIE set up for GaN Etch

RF Power: 600W, 13.56MHz

330mm Platen

Water cooled electrode 10C-80C

End point detection: Verity Optical emission spectroscopy (200-800nm)

Gas pod with 6 lines including following MFCs:
Ar      - 100sccm
CL     - 100sccm
BCL3 - 100sccm
N2O   - 100sccm

Windows PC , user friendly interface

 


Comments:

This tool was removed from production October 2014.

[Please answer this simple math question.]