CANON FPA-2500 i3 Stepper For Sale

Model Year: 1996
Quantity: 5
Condition: Refurbished system
Serial No: 510691,404573, 401555, 312547, 311540
Availability: Immediate


Wafer Size: 8” (4" - 8" capable)
Reticle Size: 5" square (6" square optional)
Magnification: 1/5 X
Image Field: 20mm x 20mm
Numerical Aperture: 0.52 ~ 0.60
Illumination Light Source: 1.5KW Super High Pressure Hg Lamp

Alignment Modes:
TTL Off-Axis He-Ne TV
TTL Off-Axis Broad Band TV

Alignment Light Source: 
He-Ne laser (633 nm)
Broad Band (Halogen lamp)

Wafer Leveling: Die by die tilt,  Global tilt

Original published performance specs of stepper when new :
Resolution: 0.40 μm
Alignment: 100nm
Uniformity: ≤ 1.2 %
Intensity:  5500 W/m2

≥ 68 wafers/hour (6”, 32 shots)
≥ 44 wafers / hour (8”, 60 shot)


Our Canon i3 steppers are offered in as-is or refurbished condition. Installation service available worldwide.

Full operational demo is available at our Livermore, CA USA litho lab.  No commitment required to see tool demonstration.  Simply contact us if you would like to schedule a visit to our facility.

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