CANON FPA-3000 i5 Stepper For Sale

Model Year: 1998
Quantity: 1
Condition: Good operational condition
Serial No: Available upon request
Availability: SOLD

Configuration:

  • Wafer: 6" or 8" (for other size, please inquire)
  • Reticle: 6"


General Specification and Information:

  • Model: FPA 3000 i5
  • First year available:  1996
  • Lens Type:  UL34-II
  • Stage Type:  FLAT
  • Chamber Type:  CD83


Projection Optics:

  • Projection Magnification: 1/5 X
  • Exposure Light:  365nm
  • Numerical Aperture:  .45 -.63
  • Field Size:  22x22 (or 17x26)


Standard Illumination:

  • Light Source:  2.0KW Super High Pressure Hg Lamp
  • Intensity:  8000 W/m2
  • Uniformity:  < 1.0%
  • Focus/Leveling Repeatability:  <0.10µm (3sigma) 


Standard Performance:

  • Resolution:  <0.35µm
  • Depth of Focus:  >1.0µm
  • Image Field Deviation:  <.3µm
  • Distortion:  <±0.035µm 

Standard Stage Specification:

  • Step Accuracy:  <0.03µm (3sigma)
  • Scaling:  <±0.5ppm
  • Orthogonality:  <±0.5ppm 

Standard Alignment Specification:

  • Reticle Rotation Accuracy:  <±0.01µm
  • Wafer Alignment:  <0.04µm mean + 3sigma
  • Reticle Rotation Repeatability:  <0.02µm)

Standard Leveling:

  • Leveling Repeatability:  <7ppm (3sigma)
  • Minimum Compensation Range:  >100ppm 
  • Reticle:  Standard Size 6" square t=0.25" ( Patticle checker)
  • Wafer Size:  Standard 8”  ( 6” thru 8” SEMI Standard,   Notch / Flat )
  • Throughput:  74wph (60 shot)90mj/cm ( 8” Wafer) 

Chamber Specifications:

  • Chamber Type:  CD83
  • Air Conditioner: Y75-4105-000
  • Refrigerant:  R22
  • Gram (g):  5000
  • Pounds (lbs):  11.02

 

 

 


Comments:

This Canon i5 stepper is being offered fully refurbished with installation and 3 months parts and labor warranty worldwide. Refurbishment lead time is estimated at 3-4 months.  Full operational demo for buy off at our facility. We are also offering TEL ACT 8, Single Block, i-line, Coater/Developer from our stock.  Turn-key Stepper/Track package can be quoted at very attractive price.

Please contact us to discuss this, if you have near term or long-term need.
 

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