CANON FPA-3000 EX4 DUV Stepper For Sale
Model Year: | 1998 |
Quantity: | 1 |
Condition: | Refurbished system |
Serial No: | 7114002 |
Availability: | Immediate |
Configuration:
This wafer stepper was fully refurbished by the OEM, Canon, in Japan. GCEMarket is the owner of this tool and are offering it WORLDWIDE with installation and 3 months parts and labor warranty. Customization, modification, and training are also available with purchase.
Specifications:
- Magnification: 5:1 Reduction
- NA: 0.4 ~ 0.6 Variable
- Resolution: < 0.25um
- Image Field Size: 22mm x 22mm ~ 17mm x 26mm
- Light Source: Wavelength 248nm ; Pulse Frequency 1kHz; Power 10W
- Reticle Size: 6" x 6", 0.25" thick
- Wafer size: Max 8"
- Auto-Alignment: Off-Axis Broad-Band; Off-Axis He-Ne
- Stage Repeatability: < 35nm
- Dimensions: W1900 x D2600 x H2450 (mm)
Configured as:
- Wafer size: Set for 8"
- Wafer size conversion to 6" or 4" can be quoted
- Wafer Shape: Notch
- Chuck Type: Pin Chuck or Ring Chuck (please specify)
- Number of Reticle Cassettes: 14
- Reticle size: 6"
- Reticle Barcode Reader
- Cassette Barcode Reader
- Current Software Version: V11.07A4
- Cymer ELS-5300 KrF laser, 248nm Wavelength
Optional Accessories:
- Chuck Maintenance Unit w/case
- Bar Mirror Case
- Chuck Case
Full performance data is available upon request. Pictures are for illustration purpose only and they are of a similar system. This system is fully crated and ready for immediate shipment.
Comments:
This tool is being offered fully refurbished with full start up and qualification at your fab. Also includes full parts and labor warranty.
Parts Available For CANON FPA-3000 EX4 DUV Stepper
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This product is located at our USA - West Coast facility.