CANON FPA-3000 EX4 DUV Stepper For Sale

Model Year:	1998
Quantity:	1
Condition:	Refurbished system
Serial No:	7114002
Availability:	Immediate

Configuration:

This wafer stepper was fully refurbished by the OEM, Canon, in Japan.  GCEMarket is the owner of this tool and are offering it WORLDWIDE with installation and 3 months parts and labor warranty.  Customization, modification, and training are also available with purchase.

Specifications:

• Magnification: 5:1 Reduction
• NA: 0.4 ~ 0.6 Variable
• Resolution: < 0.25um
• Image Field Size: 22mm x 22mm ~ 17mm x 26mm
• Light Source: Wavelength 248nm ; Pulse Frequency 1kHz; Power 10W
• Reticle Size: 6" x 6",  0.25" thick
• Wafer size: Max 8"
• Auto-Alignment:  Off-Axis Broad-Band; Off-Axis He-Ne
• Stage Repeatability: < 35nm
• Dimensions: W1900 x D2600 x H2450 (mm)

Configured as:

• Wafer size: Set for 8"
• Wafer size conversion to 6" or  4" can be quoted
• Wafer Shape: Notch
• Chuck Type: Pin Chuck or Ring Chuck (please specify)
• Number of Reticle Cassettes: 14
• Reticle size: 6"
• Reticle Barcode Reader
• Cassette Barcode Reader
• Current Software Version: V11.07A4
• Cymer ELS-5300 KrF laser, 248nm Wavelength

Optional Accessories:

• Chuck Maintenance Unit w/case
• Bar Mirror Case
• Chuck Case

Full performance data is available upon request. Pictures are for illustration purpose only and they are of a similar system. This system is fully crated and ready for immediate shipment.

Comments:

This tool is being offered fully refurbished with full start up and qualification at your fab. Also includes full parts and labor warranty.