ALCATEL AMS-200 DRIE For Sale

Model Year: 2003
Quantity: 1
Condition: Excellent operational condition
Serial No: Available upon request
Availability: SOLD

Configuration:

Alcatel AMS-200 DRIE

Inductively Coupled Plasma configuration

Ceramic Clamp type

Wafer size : 6 inch

MKS Spectrum 3000W 13.56MHz RF Generator

ENI 500W 380 KHz RF Generator

Gases: SF6, C4F8, O2, O2

Process: Deep Silicon Etch


Comments:

System was fully operational when deinstalled in January 2015. Deinstallation audit report is attached as a pdf file. This system can be purchased in as-is condition or as refurbished system.  

[Please answer this simple math question.]