OXFORD Plasmalab 100 ICP Etcher For Sale

Model Year: 2002
Quantity: 1
Condition: Refurbished system
Serial No: Available upon request
Availability: SOLD

Configuration:

  • ICP 180 Assembly
  • Single wafer load lock
  • HP computer with Intel Dual Core processor
  • Operating system: windows XP professional
  • Oxford Software Revision: PC 2000 V1.7a
  • Capable of processing upto 8" wafers
  • 205mm with backside Helium Cooling
  • ICP RF power: 3kW
  • Automatic Matching Unit Control
  • VAT Adaptive Pressure Controller

 

Externally mounted gas pod with 6 lines with following MKS MFCs installed:

  1. 1) Ar 50 sccm
  2. 2) O2 100 sccm
  3. 3) SF6 50 sccm
  4. 4) N2 100 sccm
  5. 5) SiCl4 20 sccm
  6. 6) Space  (to add one more MFC)
  • Alcatel Turbo pump (Chamber) : Alcatel ATH 1300-M
  • Chamber roughing pump: Leybold D40BCS Vacuum Pump (roughing pump)
  • Load Lock roughing pump

 

This system is well suited for at least the following applications:

  • low damage etching of III-V's
  • high rate SiO2 etching
  • high rate anisotropic etch of Si for MEMS applications 

 


Comments:

  • Refurbished system guaranteed to meet OEM specs. 
  • 3 months parts warranty
  • Full power up inspection at our Blackwood, NJ USA facility can be scheduled upon request.
  • Also available for purchase in "As-is" condition

 

GCE has extensive experience with Sales, refurbishment, and support of Oxford Instrument models: 80+ , 800+ , 100+ in PECVD, RIE, and ICP configurations.  You are welcome to inspect prior to making a purchase commitment.  Buy with confidence from the company that stands behind what they sell.

 

Please contact us for more details and price quote.

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