OXFORD Plasmalab 100 ICP etcher For Sale

Model Year: 2001
Quantity: 1
Condition: Refurbished system
Serial No: Available upon request
Availability: SOLD

Configuration:

  • ICP 180 Assembly
  • Single wafer load lock
  • User friendly Windows PC interface
  • Capable of processing upto 8" wafers
  • 205mm with backside Helium Cooling
  • Wafer Clamp: 200mm
  • ICP RF power: 3kW
  • Externally mounted gas pod with 6 lines: O2, SF6, CH4, H2, Cl2, Ar. 
  • Alcatel Turbo pump (Chamber) : Alcatel ATP 80
  • Alcatel Turbo pump (Load Lock) : Alcatel ATH 1300
  • Chamber roughing pump 
  • Load Lock roughing pump

Comments:

This tool is installed in cleanroom. Inspection can be arranged upon request.

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