LEYBOLD Z550 Sputter For Sale

Model Year:	N/A
Quantity:	1
Condition:	Good operational condition
Serial No:	Available upon request
Availability:	SOLD

Configuration:

Leybold Z550 configured as follows:

2x sputtering cathodes, 1x heating station

RF Etch, RF Bias

DC Sputtering

Manual vacuum load (5e-3mbar)

3x gas inlet (currently Ar, N2, O2)

Equipped with four plates (for up to 1x8” wafers or 2x4” wafers)

Turbo pump for a base pressure of 2e-7mbar

Computer controlled with data logging
 

Comments:

This sputtering tool is in good operational condition.  It is available for operational inspection for a limited time.  In Jan 2013, it is scheduled to be moved out from cleanroom to storage.