Our core offering includes refurbished Canon wafer steppers and associated spare parts and services.
Why Canon Steppers from GCE ?
- Proven solutions for Si, GaAs, SiC, Sapphire, Glass, and other exotic substrates
- Wafer Size Options: 4" , 6" , 8" (smaller substrates possible with carrier wafer)
- Reticle Size Options: 5" , 6"
- Each stepper configured and optimized for customer's specific application
- Performance guaranteed to be in full compliance with original new tool specification
- Installation, warranty, training, and after sale support offered worldwide
- Comprehensive spare parts program with spare parts available to ship immediately
- High level factory trained senior engineers on staff full time
- 3000 SqFt Lithography Lab Cleanroom within 13,500 SqFt facility in Livermore, CA
- The largest inventory worldwide of Canon FPA-3000 steppers & spare parts for sale
Featured Canon Steppers
|FPA-2500 i3 Stepper||Res: 0.40um, Align: 100nm, Field: 20mm, i-Line||5|
|FPA-3000 EX4 DUV Stepper||Res: 0.25um, Align: 45nm, Field: 22mm||1|
|FPA-3000 EX5 DUV Stepper||Res: 0.22um, Align: 40nm, Field: 22mm||6|
|FPA-3000 i4 Stepper||Res: 0.35um, Align: 60nm, Field: 22mm, i-Line||5|
|FPA-3000 iW Stepper||Res: 0.8um, Align: 100nm, Field: 50mm, i-Line||1|
Canon Stepper Selection Chart: