We offer refurbished KLA CD-SEM systems and associated spare parts with the largest inventory in the market.  This product line is supported from our operations center in Blackwood, NJ USA.  This location houses a 2500 SqFt metrology refurbishment lab within 12,000 SqFt facility.
Why GCE ?

  • Proven solutions for Si, GaAs, SiC, Sapphire, Glass, and other exotic substrates
  • Wafer Size Options: 3" - 8"   (smaller substrates run with carrier wafer)
  • Run variety of wafer sizes & types on the fly. No hardware changes = zero downtime !
  • Each CD-SEM configured and optimized for customer's specific application
  • Performance guaranteed to be in full compliance with original new tool specification
  • Installation, warranty, training, and after sale support offered worldwide
  • Comprehensive spare parts program with spare parts available to ship immediately
  • More than 50 CD-SEMs deployed for fabs in US, Europe, Russia, Taiwan, China, Brazil
  • High level factory trained senior engineers on staff full time
  • The largest inventory worldwide of KLA 8xxx CD-SEMs and spare parts for sale

Re-engineered by GCE as the most versatile CD-SEM solution in the market ! 

Talk to us before selecting CD-SEM platform for your fab.


Featured KLA CDSEM

8100 CD-SEMRes: 4.5nm, Features: 100nm, 3"-8" wafers, Mag: 400kx3
8100XP CD-SEMRes: 4nm, Features: 30nm, 3"-8" wafers, Mag: 400kx3
8100XPR CD-SEMRes: 4nm, Features: 30nm, 5"-6" reticles, 3"-8" wafers, Mag: 400kx2
8250 CD-SEMRes: 4nm, Features: 30nm, 3"-8" wafers, Mag: 400kx2


KLA CD-SEM Selection Chart:

Our Refurbishment Process:

  • New electron source
  • All main power modules are refurbished and tuned for optimal performance  (Shottkey gun controller, Detector controller, DC power supply, & Wein Filter)
  • Robot, robot controller, & pre-aligner rebuilt and re-calibrated
  • Chamber vacuum feed through assemblies replaced with new
  • Stage motors replaced, X and Y
  • All consumables replaced (Apertures / scintilator, etc)
  • End effector inspected and replaced if required
  • Turbo pump rebuilt
  • Both scroll pumps fully rebuilt
  • All mechanical assemblies inspected and repaired/replaced, as required.
  • All wiring and tubing inspected and repaired/replaced, as required. 
  • Each load port is calibrated to run customer specified wafer size(s). Pipe line cycle tests are run to ensure flawless operation in full automation.