FUSION SYSTEMS Gemini Photostabilizer System (GPS) For Sale

Model Year:	1999
Quantity:	1
Condition:	Refurbished system
Serial No:	Available upon request
Availability:	SOLD

Configuration:

Axcelis / Fusion Gemini Photostabilization System (GPS)
 
- Presently configured for 200mm wafers (modifications to 6" can be quoted)
- Configured with Integrated SMIF loader (suitable for open cassette also)
- High throughput, Dual Chambers
- Configuration details and pictures .... coming soon
 

 

Comments:

- Fully refurbished system guaranteed to meet original OEM specs
- 3 months warranty (optional: upto 12 months can be quoted)
- Full power up inspection at our Blackwood, NJ USA facility can be scheduled upon request