FUSION SYSTEMS M200 PCU Photostabilizer System For Sale

Model Year:	N/A
Quantity:	1
Condition:	Refurbished system
Serial No:	Available upon request
Availability:	SOLD

Configuration:

Axcelis / Fusion M200 PCU Photostabilization System

- Single chamber DUV Photostabilizer
- Wafer Size: 8" or 6"
- Shielded SECS Cables
- UV Bake process applications
- Irradiator contains Hg High Intensity Lamp and 2.45 GHz magnetrons
- two cassette stations
- Microprocessor controlled
- Pneumatic controlled uplift for irradiator
- SECS I software interface
- SW v3.03 including system intf PCB 269591 B
- Through-the-Wall Compatibility
- UV Port Housing
- HW Harness & switch for right cassette platform
- Ceramic Wafer Pans
- Low Vacuum Reduction Kit for improved chucking
- PTFE Impregnated Thermal Chuck

Comments:

- Fully refurbished system guaranteed to meet original OEM specs
- 3 months warranty (optional: upto 12 months can be quoted)
- Full power up inspection at our facility is available