CANON FPA-3000 EX5 DUV Stepper For Sale

Model Year:	1998
Quantity:	1
Condition:	Complete system
Serial No:	8095011
Availability:	Immediate

Configuration:

Wafer size: 4" / 6" / 8" (customer may specify per their requirement)
Reticle size:  6" Square
Field Size:  22 X 22 mm

Exposure Light: 248 nm, DUV
Light Source KrF Excimer Laser CYMER/ELS-53XX  (NOT INCLUDED)

Projection Magnification: 1/5 X
Numerical Aperture:  0.63~0.45

Estimated Throughput:
85 wph   (60 shot / 22 mm / 8” Wafer)
110 wph (32 shot / 22 mm / 6" Wafer)
 

Comments:

This EX5 stepper is being installed at our facility at this time.  It will be going through basic operational checks soon.

To further discuss, please contact us