CANON FPA-3000 EX5 DUV Stepper For Sale
Model Year: | 1998 |
Quantity: | 1 |
Condition: | Complete system |
Serial No: | 8095011 |
Availability: | Immediate |
Configuration:
Wafer size: 4" / 6" / 8" (customer may specify per their requirement)
Reticle size: 6" Square
Field Size: 22 X 22 mm
Exposure Light: 248 nm, DUV
Light Source KrF Excimer Laser CYMER/ELS-53XX (NOT INCLUDED)
Projection Magnification: 1/5 X
Numerical Aperture: 0.63~0.45
Estimated Throughput:
85 wph (60 shot / 22 mm / 8” Wafer)
110 wph (32 shot / 22 mm / 6" Wafer)
Comments:
This EX5 stepper is being installed at our facility at this time. It will be going through basic operational checks soon.
To further discuss, please contact us
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This product is located at our USA - East Coast HQ facility.