CANON FPA-3000 EX5 DUV Stepper For Sale

Model Year: 1998
Quantity: 1
Condition: Refurbished system
Serial No: 8105020
Availability: Immediate

Configuration:

Ready for Immediate Shipment (September 2021)

Wafer size: 4" / 6" / 8" (customer may specify per their requirement)
Reticle size:  6" Square
Field Size:  22 X 22 mm

Exposure Light: 248 nm, DUV
Light Source KrF Excimer Laser CYMER/ELS-5305
Intensity:  3100 w/m2
Uniformity:  2.1%

Projection Magnification: 1/5 X
Numerical Aperture:  0.63~0.45 in 0.01 increments

Estimated Throughput:
85 wph   (60 shot / 22 mm / 8” Wafer)
110 wph (32 shot / 22 mm / 6" Wafer)

Optics performance data is available upon request.

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Configuration file is attached. See the link on the left side just below pictures.
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14 pictures are attached
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A short video of wafer handling can be seen at the following link.
Password = gce12345
wafer handling video.mp4
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Comments:

This Canon EX5 stepper has been refurbished by our team.

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In addition to this stepper, we have two more EX5 steppers with Serial #s 8105011 and 8105015.  Both are complete systems and are stored in cleanroom.
 

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