CANON FPA-3000 EX5 DUV Stepper For Sale

Model Year:	1998
Quantity:	2
Condition:	Complete system
Serial No:	8105015, 8105011
Availability:	Immediate

Configuration:

Wafer size: 4" / 6" / 8" (customer may specify per their requirement)
Reticle size:  6" Square
Field Size:  22 X 22 mm

Exposure Light: 248 nm, DUV
Light Source KrF Excimer Laser CYMER/ELS-5300

Projection Magnification: 1/5 X
Numerical Aperture:  0.63~0.45

Estimated Throughput:
85 wph   (60 shot / 22 mm / 8” Wafer)
110 wph (32 shot / 22 mm / 6" Wafer)
 

Comments:

Both EX5 steppers will be refurbished and made available for operational demonstration in the near future

To further discuss, please contact us.