CANON FPA-3000 EX5 DUV Stepper For Sale
Model Year: | 1998 |
Quantity: | 2 |
Condition: | Complete system |
Serial No: | 8105015, 8105011 |
Availability: | Immediate |
Configuration:
Wafer size: 4" / 6" / 8" (customer may specify per their requirement)
Reticle size: 6" Square
Field Size: 22 X 22 mm
Exposure Light: 248 nm, DUV
Light Source KrF Excimer Laser CYMER/ELS-5300
Projection Magnification: 1/5 X
Numerical Aperture: 0.63~0.45
Estimated Throughput:
85 wph (60 shot / 22 mm / 8” Wafer)
110 wph (32 shot / 22 mm / 6" Wafer)
Comments:
Both EX5 steppers will be refurbished and made available for operational demonstration in the near future
To further discuss, please contact us.
Parts Available For CANON FPA-3000 EX5 DUV Stepper
-
Available -
tell a friend -
print
Related Equipment For Sale
This product is located at our USA - East Coast HQ facility.