CANON FPA-3000 i4 Stepper For Sale

Model Year: 1998
Quantity: 1
Condition: Refurbished system
Serial No: may vary
Availability: Qty and availability may vary


Each sytem has been well maintained and is available for full operational demonstration.

Orignal new stepper specifications are as follows.

Wafer:  8", 6" or 4" (for other sizes, please inquire)
Reticle:  6"  (Nikon Style or Canon Style reticle loader available)

General Specification and Information:
Canon FPA 3000 i4
Stage Type:  ABS (Air Bearing Stage)
Chamber Type:  CD80

Projection Optics:
Projection Magnification:  1/5 X
Exposure Light:  365nm
Numerical Aperture:  0.63~0.45
Field Size:  22x22mm ~ 17x26mm

Standard Illumination:
Exposure Light:  i-Line
Light Source:  2.0KW Super High Pressure Hg Lamp
Intensity:  >6500W/m2
Uniformity:  < 1.0%
Masking Blade:  Blades Independent (0.4X0.4mm~26X26mm on wafer)

Printing Performance:
Resolution:  <0.35µm
Depth of Focus:  >1.0µm
Image Field Deviation:  <0.5µm
Distortion:  <±0.05µm

Focus/Leveling Performance:
Focus Repeatability:   <0.10µm (3sigma)
Leveling Repeatability:  <7ppm (3sigma)
Minimum Compensation Range:  >100ppm

Wafer Alignment Performance:
Lighting Source:  He-Ne Laser, Broad Band(Halogen Lamp)
Signal Process:  TV Image Processing
System:  Off Axis TTL
Mode:  AGA

Standard Stage Specification:
Step Accuracy:  <0.04µm (3sigma)
Scaling:  <±0.5ppm
Orthogonality:  <±0.5ppm

Standard Alignment Specification:
Reticle Rotation Accuracy:  <±0.015µm
Wafer Alignment:  <0.6µm mean + 3sigmaicle Rotation Repeatability:  <0.05µm)

Reticle: Standard Size 6" square t=0.25" ( Patticle checker) :
Material:  Quartz
Pattern Material:  2 layer CR, 3 Layer CR
Pellicle Frame:  Pattern Side only Stand Off = 6.3mm

Reticle Particle Checker Specification:
Detection Resolution
Glass Surface:  >15µm
Pellicle Surface:  >20µm
Detection Repeatability: >95%

Size:  Standard 8” ( 6” thru 8” SEMI Standard, JEIDA,Notch / Flat, Optional)
Throughput:  >59wph (60 shot wafer)22mm ( 8” Wafer)
Throughput:  >83wph (32shot wafer)22mm ( 6” Wafer)

Environmental Chamber Specification:
Cleanness: Class 1(>0.1µm)
Chamber Specifications:
Chamber Type: CD80
Air Conditioner: Y75-4105 (TWH-301JA-A TH297 JA)
Refrigerant: R22
Gram (g): 5000
Pounds (lbs): 11.02


We are offering total turnkey solution which includes:
• Full refurbishment
• Full operational demo at our facility
• Training at GCE facility
• Installation and training at customer's facility
• 3 months parts and labor warranty worldwide
• Extended warranty available for upto full year (optional)
We welcome discussions for customization to meet your specific needs.

Parts Available For CANON FPA-3000 i4 Stepper

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