CANON FPA-3000 i4 Stepper For Sale
Model Year: | 1998 |
Quantity: | 1 |
Condition: | Excellent operational condition |
Serial No: | Coming Soon |
Availability: | In Stock |
Configuration:
Wafer size: 4" / 6" / 8" (customer may specify per their requirement)
Reticle size: 6" Square
Field Size: 22 X 22 mm
Exposure Light: 365nm
Light Source: 2.0KW Super High Pressure Hg Lamp
Projection Magnification: 1/5 X
Numerical Aperture: 0.63~0.45
Estimated Throughput:
59 wph (60 shot / 22 mm / 8” Wafer)
83 wph (32 shot / 22 mm / 6" Wafer)
Comments:
Installation service available Worldwide
To further discuss, please contact us
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This product is located at our USA - East Coast HQ facility.