CANON FPA-3000 i4 Stepper For Sale

Model Year: 1998
Quantity: 1
Condition: Refurbished system
Serial No: 605669
Availability: In Stock

Configuration:

 
Wafer size: 4" / 6" / 8" (customer may specify per their requirement)
Reticle size:  6" Square
Field Size:  22 X 22 mm

Exposure Light: 365nm
Light Source:  2.0KW Super High Pressure Hg Lamp

Projection Magnification: 1/5 X
Numerical Aperture:  0.63~0.45

Estimated Throughput:
59 wph   (60 shot / 22 mm / 8” Wafer)
83 wph   (32 shot / 22 mm / 6" Wafer)

illumination data taken in February 2024:
Uniformity : 0.921%
Intensity    : 9,916 w/m2


Comments:

Installation service available Worldwide

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Parts Available For CANON FPA-3000 i4 Stepper

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