CANON FPA-3000 i4 Stepper For Sale

Model Year:	1998
Quantity:	1
Condition:	Refurbished system
Serial No:	605669
Availability:	In Stock

Configuration:

This refurbished tool is installed at our Lab in Blackwood, NJ, USA and is ready for operational demonstration.  Recent performance data is available upon request.

Suitable for variety of wafer types:  Silicon, Silicon Carbide, Gallium Nitride, and all other Compound Semi substrates as well as clear wafers.

Wafer size: 4" / 6" / 8" (customer may specify per their requirement)
Reticle size:  6" Square
Field Size:  22 X 22 mm

Exposure Light: 365nm
Light Source:  2.0KW Super High Pressure Hg Lamp

Projection Magnification: 1/5 X
Numerical Aperture:  0.63~0.45

Estimated Throughput:
59 wph   (60 shot / 22 mm / 8” Wafer)
83 wph   (32 shot / 22 mm / 6" Wafer)

illumination data taken in July 2024:
Uniformity : 0.921%
Intensity    : 9,916 w/m2

Comments:

Installation service available Worldwide

To further discuss, please contact us