KLA-Tencor 8100XPR CD-SEM For Sale

Model Year: 1999
Quantity: 2
Condition: Refurbished system
Serial No: several in stock
Availability: 12-14 weeks leadtime


KLA-Tencor 8100XPR CD-SEM is an advanced metrology instrument with capability to provide superior imaging and precision measurements at the bottom of very high aspect ratio device features.

Performance Specification:
• Feature Size:  < 30 nm
• Resolution:    < 4 nm
• Electron Source: Schottky, Thermal Field Emitter
• Magnification: 2.34 kX - 400 kX
• Stage: X-Y leadscrew stage, Position Accuracy < 10 micron
• Accelerating Voltage:  0.4kV - 1.5kV
• Throughput:  upto 50 wafers/hr

Configured as follows:
• 1 or 2 Reticle loading stations, 1 or 2 wafer cassette loading stations
• Reticle size: 5" or 6" square
• Wafer size:  3” – 8” (Si, GaAs, Sapphire, SiC, etc)
• Windows XP or MAC OS, user friendly interface
• 1 or 2 wafer loading stations (each can run multiple sizes)
• Chamber pump: Edwards or Varian  dry scroll pump
• Load lock pump: Edwards or Varian dry scroll pump
• Dedicated UPS system for emergency power back up
• Power: 120V-220VAC, 1PH, 50/60HZ

Our turnkey offering includes the following:
• Guaranteed to be in full compliance with original new tool specifications
• Full acceptance testing prior to shipment
• Installation, start up, & training at customer's facility worldwide
• Warranty options:  3, 6, or 12 months
• Unlimited support by email and phone calls


Re-engineered by GCE as the most versatile CD-SEM solution in the market ! 

With focus and commitment to long term service and spare parts support, GCE has successfully deployed more than 50 systems worldwide.

Why GCE ?  Click here for more information

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