KLA-Tencor 8250 CD-SEM For Sale

Model Year:	2005
Quantity:	2
Condition:	Refurbished system
Serial No:	several in stock
Availability:	10-12 weeks leadtime

Configuration:

KLA-Tencor 8250 CD-SEM is an advanced metrology instrument with capability to provide superior imaging and precision measurements at the bottom of very high aspect ratio device features.

Performance Specification:
• Feature Size:  < 30 nm
• Resolution:    < 4 nm
• Electron Source: Schottky, Thermal Field Emitter
• Magnification: 2.34 kX - 400 kX
• Laser Stage: X-Y leadscrew stage, Position Accuracy < 1 micron
• Accelerating Voltage:  0.4kV - 1.5kV
• Throughput:  upto 55 wafers/hr

Configured as follows:
• Wafer size:  3” – 8” (Si, GaAs, Sapphire, SiC, etc)
• Windows XP or MAC OS, user friendly interface
• 3 wafer loading stations (each station can run multiple size wafers)
• Chamber pump: Edwards or Varian  dry scroll pump
• Load lock pump: Edwards or Varian dry scroll pump
• Dedicated UPS system for emergency power back up
• Power: 120V-220VAC, 1PH, 50/60HZ

Our turnkey offering includes the following:
• The system is guaranteed to be in full compliance with original specs
• Full demonstration for pre-shipment acceptance at GCE facility
• Installation, start up, and training at customer's facility worldwide
• 3 month parts and labor warranty  (6 and 12 month warranty can be quoted)
• Unlimited support by email and phone calls

Comments:

Re-engineered by GCE as the most versatile CD-SEM solution in the market ! 

With focus and commitment to long term service and spare parts support, GCE has successfully deployed more than 50 systems worldwide.

Why GCE ?  Click here for more information