ASM A412 LPCVD For Sale

Model Year:	2004
Quantity:	1
Condition:	Good operational condition
Serial No:	Available upon request
Availability:	SOLD

Configuration:

ASM Advance 412 LPCVD system

2 reactor modules, Each can run 200mm and 300mm

Two I/O positions for 25 wafers capacity cassettes.  One 200mm and one 300mm

One Carousel with 7 levels

Gases:
Atmospheric reactor (Oxidation)
· N2: 20 SLM
· O2 high: 15 SLM
· O2 low: 500 SCCM
· H2: 15 SLM
· Ar: 20 SLM
· DCE:

LP reactor (Oxide Deposition)
· N2 high : 5 SLM
· N2 low : 250 SCCM (not present in the schematic)
· O2: 200 SCCM
· The TEOS flow is controlled by VCS+MFM (mass flow meter): 500 SCCM

More details are available upon request
 

Comments:

Fully Operational system.  Available for operational inspection upto end of Feb 2013.  After that it will be deinstalled and moved into storage.

This tool is located at SOITEC's facility in France.