OXFORD Plasmalab 80+ PECVD For Sale

Model Year: 2001
Quantity: 1
Condition: Refurbished system
Serial No: Available upon request
Availability: SOLD

Configuration:

  • Direct Loading
  • Capable of processing upto 8" wafers
  • User friendly Windows PC interface
  • Externally mounted gas pod with up to 6 gas lines. 
  • Chamber roughing pump 

Comments:

This tool is installed in cleanroom. Inspection can be arranged upon request.

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