OXFORD Plasmalab 800+ PECVD For Sale

Model Year:	2006
Quantity:	1
Condition:	Complete system
Serial No:	Available upon request
Availability:	SOLD

Configuration:

Set up for SiOx, SiNx, SiOxNy Deposition

Batch Process

450mm Platen with 300°C+ heater

RF Power:  350W 13.56MHz and 300W 480KHz

Gas pod with 6 lines including following MFCs:
N2     - 1000sccm
N2O  -  100sccm
N2O  -  2000sccm
NH3  -  100sccm
SiH4 -   2000sccm

Windows PC , user friendly interface

Comments:

This tool was removed from production October 2014.