SPTS MPX PRO PECVD For Sale

Model Year:	2011
Quantity:	1
Condition:	Refurbished system
Serial No:	Available upon request
Availability:	SOLD

Configuration:

SPTS MPX PRO PECVD configured as follows: 
- TEOS or Silane based Plasma Enhanced Chemical Vapor Deposition
- Process: Oxide and Nitride deposition  (SiNx, SiO2)
- Configured for 100mm Wafers (capable of upto 200mm)
- Manually loaded Carousel Load Lock (2-Wafer Carousel)

PRO2 CVD Chamber:
- Driven Electrode, Upto 350C temperature
- Chamber heating upto 100C via distributed cartridge heaters 
- Lid assembly heating of 300C max via a cast block
- High depositon rate with high gas flow capability
- shower head design gives highly uniform performance upto 200mm substrates due to advanced baffle and diffuser design

Mixed Frequency configuration:
- ENI   13.56MHz 300W  RF power supply ACG3B
- Adtec 13.56MHz 2500W rated matching network
- RFPP  380KHz 1000W Coaxial Power LF Power Supply
- Adtec 380KHz 2500W rated matching network

Maxi Gas Box:
- C4F8 @ 200  SCCM
- O2      @ 3000 SCCM
- N2O   @ 3000 SCCM
- SiH4  @ 200  SCCM
- NH3   @ 400  SCCM
- N2      @ 3000 SCCM
- Ar       @ 1000 SCCM
- He     @ 200  SCCM
- Space allocated for several more MFCs

- LDS (liquid delivery system) for TEOS
- SPTS etch back end point detection
- Alcatel Adixen ACG 28G dry Pump (Load Lock)
- Edwards iH1000 Dry pump package (Chamber)
- SMC HRS012-WF-20-M Pure Water Chiller
- System PC with Windows XP operating sytem
- SPTS PRO System Software
- Full OEM documentation of user manuals and service manuals
- Electrical input: 208, 3PH, 80A, 60 HZ

Comments:

This SPTS / STS system was manufactured in 2007. It  is in excellent condition and has the latest control system and software.