OXFORD Plasmalab 80+ PECVD For Sale

Model Year: 2001
Quantity: 1
Condition: Good operational condition
Serial No: Available upon request
Availability: SOLD

Configuration:

Oxford Plasmalab 80+ PECVD System

 

Direct Loading system

Capable of processing upto 8" wafers 

User friendly Windows PC interface 

Externally mounted gas pod with up to 6 gas lines.  

Chamber roughing pump  

 


Comments:

This tool was powered down recently.  It was in good operational condition.

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