STS Multiplex PECVD For Sale

Model Year:	1996
Quantity:	1
Condition:	Complete system
Serial No:	Available upon request
Availability:	SOLD

Configuration:

• STS PECVD system
• Single chamber with loadlock.  Loadlock is standard arm type capable of 4-8” wafers.  
• Top electrode biased with RF
• RF generator, RFPP LF-10 with matching network
• Gas pod:  Capable of up to 8 gases + purge.  Currently configured for N2, CF4/O2, N2O, SiH4, PH3/N2, 2 purge gases and 1 vent gas.
• PPD power and electronics rack
• Pumps are not included
• Some external connection cables are missing

Comments:

This system is in good condition but will require some cables.  All modules are present and system is believed to be complete.

Available for sale As-is-where-is only.  No warranty or guarantee.