OXFORD Plasmalab 800+ PECVD For Sale

Model Year:	1999
Quantity:	1
Condition:	Refurbished system
Serial No:	Available upon request
Availability:	SOLD

Configuration:

Nitride and Oxide Deposition

Batch process tool, 18" platen
 
RF Components:
ENI:  ACG - 5 XL , RF generator, 13.56MHZ, 500W
ENI:  LPG - 6A , RF generator, 90kHz to 460kHz, 600W
ATX-600 impedence matching network
 
Gases Previously Used were the Following:  N2O , N2, NH3, SiH4
 
System Manuals Included:
Operations and Maint manual
System drawings
Illustrated Parts Catalogue
 
The tool is compact and very simple for operation. Footprint is 36"W x 42"D x 54" H. The chamber is on the top. The power supply, etc. are in the front and accessible behind a stainless steel panel. There is no load lock. You open the chamber, load one or more 4" substrates, close the chamber, and start the chamber pump down. Once the desired vacuum level is achieved, It is ready to run deposition process.

Comments:

 

Refurbished system. Inspection and demonstration available at our facility in Blackwood, NJ USA. Please contact us, if you are interested in this system.