OXFORD Plasmalab 800+ PECVD For Sale

Model Year: 2006
Quantity: 1
Condition: Complete system
Serial No: Available upon request
Availability: SOLD


Set up for SiOx, SiNx, SiOxNy Deposition

Batch Process

450mm Platen with 300°C+ heater

RF Power:  350W 13.56MHz and 300W 480KHz

Gas pod with 6 lines including following MFCs:
N2     - 1000sccm
N2O  -  100sccm
N2O  -  2000sccm
NH3  -  100sccm
SiH4 -   2000sccm

Windows PC , user friendly interface


This tool was removed from production October 2014.

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