Yield Engineering Systems, Inc. YES-450PB8
Serial Number 88747

EQUIPMENT DETAILS:
YES-PB8-2P-CP Laminar Flow High Temperature Cure Oven to including separate oven and controller assemblies as follows (900-2727-52)
-BOC Edwards iL70 pump included
-Currently Configured for 8" wafer size
-MFG Date: 26-Apr-2004

Oven Assembly:
- Chamber: One compartment-14.4"ID(Barrel) x 9.9"H x 25.7"D
- Working Area 9.4"W x 9"H x 18.1"D
- Overall oven dimension 26.13"W x 29.67"H x 44.60"D
- Wafer capacity: 2 cassettes of up to 8-inch wafers
- Material of construction: Electropolished 316L stainless steel
- Includes full dimension 100 micron inlet for preheated laminar nitrogen purge

Throttle valve assembly:
- Air-cooled chamber with external forced air convection

Rear EMO

Controller Assembly:
- Console dimension: 19.0"D x 24.5"W x 7.5"H
- PLC & touchscreen controller
- Programmable temperature controller, 25-450 C with LED temperature readout and ramp up, ramp down capability
- Multiple PID setting in temperature controller allows flexibility to run different process temperatures
- Momentary contact START and RESET switches
- Audible "Cycle Complete" indicator
- Digital Granville-Phillips double setpoint vacuum gauge
- High and Low pressure nitrogen checkpoint
- Audible and visual indication of incorrect process
- Overtemp protection shut-off
- Light tower with "abort", "cycle complete" and "running" lights with audible alarm
- EMO (front and rear)
- Auto Restart for power failures

System Specifications:
- 208V 3 Phase, 4 wire, 40 amps
- Maximum Ramp-up rate 19º C/min