YES (YIELD ENGINEERING SYSTEMS) 1224P For Sale
| Model Year: | 2007 |
| Quantity: | 1 |
| Condition: | Good operational condition |
| Serial No: | Available upon request |
| Availability: | SOLD |
Configuration:
- RF Plasma Frequency: 40 kHz
- YES Chemical Vapor Deposition System YES-1224P with plasma cleaning option
- RF Plasma Power: 100-1000 watts
- Operation Temperature: Ambient to 205 °C
- Uniformity: ± 5 °C during dwell after stabilization period
- Chemical Usage: Typical process 3-5 ml
- Chemical Volume Control: Control down to 0.1 ml
- Process Gas Inputs: 1
- Plasma Gas Inputs: 3
- Vent Gas Consumption: 10 SCF/run average
- Reactant Gas Consumption: 4.2 x 10-3 SCF (based on standard process: 170°C @ 1000W w/20 SCFM pump)
- Wafer Capacity: 8 cassettes 100mm - 150mm wafers; 2 cassettes 200mm - 300mm wafers
- Wafer Throughput: Typically 1-2 loads/hr; varies by process
- Slide Throughput: 600 slides/hr for CVD
Comments:
- The oven is in excellent operational condition
- Inspection can be arranged for serious inquiries
- Please contact us for more details and price quote
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