STS Multiplex PECVD For Sale

Model Year:	2000
Quantity:	1
Condition:	Refurbished system
Serial No:	Available upon request
Availability:	SOLD

Configuration:

STS Multiplex PECVD system

Suitable for Nitride or Oxide deposition

Carousel LoadLock (2x 100mm wafers)

CVD Chamber Parts for Single Substrate Processing

RF Bias of Top Electrode
Dual power supplies:
• RFPP LF-5, 500W, 380kHz RF Supply & Matching Unit
• RFPP LF-10A, 1000W, 380kHz RF Supply & Matching Unit 

Gas Pod:   Millipore Tylan FC-2900V MFCs
• N2,     2 SLM
• O2,     500 SCCM
• Ar,      100 SCCM
• N2O,   2 SLM
• CF4,   500 SCCM
• SiH4,  20 SCCM

Load Lock pump

Chamber Pump

Comments:

This STS / SPTS PECVD system was just powered down removed from cleanroom.  It can be purchased in as-is condition or fully refurbished condition.