AIXTRON 200 R2 (As/P) MOCVD For Sale

Model Year:	1990
Quantity:	1
Condition:	Complete system
Serial No:	Available upon request
Availability:	SOLD

Configuration:

• As/P configuration
• Throughput:  3 x 2"
• Uses Heater Lamp
• Gases used: Arsine, Phosphine, Silane, Hydrogen
• Contains 5 MO baths
• MO Used: TMA, TMG, TMI, CBR4
• Pump: Leybold Trivac D65BCS
• System Manual included (hard copy only)
• Computer controller (not functional)
• Hydrogen Purifier (not included)

Comments:

The reactor is installed in cleanroom but has been powered down.

If you are interested in this system, please contact us to further discuss.