AIXTRON 2400 (As/P) MOCVD For Sale
Model Year: | 1996 |
Quantity: | 1 |
Condition: | Complete system |
Serial No: | Available upon request |
Availability: | SOLD |
Configuration:
- As/P configuration
- Aixtron 2400 MOCVD System
- Throughput: 15 x 2" (capable of 5 x 4" or 8 x 3" but may require additional hardware of modification)
- Uses Heater Lamps
- Gases used: Arsine, Phosphine, Silane, Hydrogen
- Contains 5 MO Baths
- MO Used:TMI, TMA, TMG, DMZ
- Johnson Matthey Hydrogen Purifier
- PC controller (Confirmed functional)
- Leybold Trivac Pump, D65BCS
- System Manual (hard copy)
Comments:
- The reactor is installed in cleanroom but has been powered down
- If you are interested in this system, please contact us to further discuss