AIXTRON 2400 (As/P) MOCVD For Sale

Model Year: 1996
Quantity: 1
Condition: Complete system
Serial No: Available upon request
Availability: SOLD

Configuration:

  • As/P configuration
  • Aixtron 2400 MOCVD System
  • Throughput: 15 x 2"  (capable of 5 x 4" or 8 x 3" but may require additional hardware of modification)
  • Uses Heater Lamps
  • Gases used: Arsine, Phosphine, Silane, Hydrogen
  • Contains 5 MO Baths
  • MO Used:TMI, TMA, TMG, DMZ
  • Johnson Matthey Hydrogen Purifier
  • PC controller (Confirmed functional)
  • Leybold Trivac Pump, D65BCS
  • System Manual (hard copy)
 

Comments:

 

  • The reactor is installed in cleanroom but has been powered down
  • If you are interested in this system, please contact us to further discuss

 

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