AIXTRON 2600 G3 HT (GaN) MOCVD For Sale

Model Year:	2004
Quantity:	1
Condition:	Excellent operational condition
Serial No:	Available upon request
Availability:	SOLD

Configuration:

Aixtron 2600 G3 HT GaN MOCVD

Throughput: 8 x 4"

MO channels: 
Standard: 6
Dilution: 2

Hydridlines: 1x NH3, 2 x SiH4

Glovebox M-BRAUN

Process pump:       Ebara AA30W
Glove box pump:   Triscroll Varian PTS03101UNV
Door pump:           Triscroll Varian PTS03101UNV

Computer controller： AixAct 5.8.14.3

H2 - Purifier:
1 x Johnson Matthey H-400
1 x Aeronex CE 2500KFH4R

N2 - Purifier: 1 x Entegris CE 2500 KFSK4R

NH3 - Purifier: 1 x Entegris CE2500KFSK4R

Installation concept: dual level

MFC Manufacturer: Bronkhorst
 

 

 

Comments:

This reactor is fully installed and operational in a cleanroom. It is available for immediate sale from GCE.  Let our expertise and experience go to work for you.  We will handle the transaction for you from start to finish.

If you are interested in considering purchase of this reactor for your lab or fab, we welcome your inquir