THOMAS SWAN GaN MOCVD (2 - 4- 6" wafers) For Sale

Model Year:	2000
Quantity:	1
Condition:	Excellent operational condition
Serial No:	Available upon request
Availability:	SOLD

Configuration:

Wafer Size:
7 x 2"
2 x 4"
1 x 6"
Above throughput is possible with current tool configuration.  No modifications required.
 
MO Sources:
S1 Cp2Mg – 1
S2 Cp2Mg – 2 (spare)
S3 TMAl
S4 TMGa – 2
S5 TMGa – 1
S6 TMIn – 1
S7 TMIn – 2 (spare)
 
Gases:
100ppm SiH4
NH3
N2
H2
PH3 (for use if converted to III-V)
AsH3 (for use if converted to III-V)
 
Installed Parts:
2 year-old showerhead
2 year-old heater
Pd cell H2 purifier
Epison flow sensors on TMGa and TMIn
KSA MiniMOS inisitu high resolution stress monitoring instrument
Alcatel glovebox pump - new
Ebara 825 process pump – recently rebuilt
Alcatel regen pump – old
 
Spare Parts (available at additional charge):
New showerhead
New heater
New Pd cell H2 purifier
Assorted quartz and graphite for 2”, 4”, and 6” processes
Alcatel glovebox pump - old
Ebara 825 process pump – recently rebuilt
 
Other Equipment:
LLydel chiller for 0°C to 80°C temp control for showerhead
Cleansorb SC dry bed abatement system

 

Comments:

This reactor is fully installed and operational in a cleanroom. It is available for immediate sale from GCE.  Let our expertise and experience go to work for you.  We will handle the transaction for you from start to finish.

If you are interested in considering purchase of this reactor for your lab or fab, we welcome your inquiry.