AIXTRON 2000HT (GaN) MOCVD For Sale
Model Year: | 2000 |
Quantity: | 1 |
Condition: | Excellent operational condition |
Serial No: | Available upon request |
Availability: | SOLD |
Configuration:
- Nitride configuration (GaN)
- Planetary Reactor with Gas Foil Rotation
- Throughput: 6 x 2"
- RF Cooling Water
- Gases used: N2 H2 Sih4 HCL NH3
- Contains 7 MO Baths
- MO Used: TMG, TMA, Cp2Mg, TEG, TMI
- PC controller (Confirmed functional)
- Ebara Dry Pump
- System Manual (hard copy)
Comments:
The reactor is installed in cleanroom but has been powered down.
If you are interested in this system, please contact us to further discuss.