VEECO E450 (As/P) MOCVD For Sale

Model Year:	2001
Quantity:	1
Condition:	Good operational condition
Serial No:	Available upon request
Availability:	SOLD

Configuration:

• Original system built in year 2001 as E400 by Veeco. Currently system is undergoing upgrade to E450 configuration.
• GCE is offering for sale a fully refurbished E450 system with short jar reaction chamber configured as follows:
• Group III MO sources:  TMGa - 2 units; TMIn ­ 2 units; TMAl -2 units
• Group V hydride sources:  AsH3 -2 lines; PH3 -1 line.
• Dopants MO:  CP2Mg -1 unit, CBr4 - 1 unit
• Dopants Hydride:  H2/SiH4 - 2 lines
• Neslab bath: 7 units
• Lorex Piezocon: 2 channels for TMI expendable to 4 (for 2 additional TMG)
• Pump:  EBARA A70W
• Exhaust system: two 2 particle filters/ housing; Phosphorus trap; P-trap automatic regeneration system
• Load lock:  Loadlock chamber; Glove Box; Moisture monitor; Wafer carrier transfer robotic system
• Heater:  3 heater elements, inner, middle, outer graphite heater
• Temperature control:  Temperature monitor 3 point T/C, Yokogawa controller, 3 point Sekidenko Pyrometer.
• Gas Monitoring:  Gas leak monitor; Toxic gas , H2 gas monitor system; CM4 4 point toxic gasmonitor
• Software:  Epi Windows 2000 software. Epitek software available.
• Wafer capacity:  up to 48 two inch wafers.
   

Comments:

This offering is for a fully refubished E450 system. Tier 0, Tier I, Tier II start up can be quoted for locations worldwide. Training and support is available worldwide. If you are interested in considering this system for purchase, pleaes do not hesitate to contact us. If you are currently a user of E400 system and would like to consider upgrading your system to E450 configuration, we have a separate offering for UPGRADE only. Please contact us to inquire further.