KLA-Tencor 8100 CD-SEM For Sale
Model Year: | 1998 |
Quantity: | 3 |
Condition: | Refurbished system |
Serial No: | several in stock |
Availability: | 10-12 weeks leadtime |
Configuration:
KLA-Tencor 8100 CD-SEM is an advanced metrology instrument with capability to provide superior imaging and precision measurements at the bottom of very high aspect ratio device features.
Performance Specification:
• Feature Size: < 100 nm
• Resolution: < 4.5 nm
• Electron Source: Schottky, Thermal Field Emitter
• Magnification: 2.34 kX - 400 kX
• Stage: X-Y leadscrew stage, Position Accuracy < 10 micron
• Accelerating Voltage: 0.4kV - 1.5kV
• Throughput: upto 40 wafers/hr
Configured as follows:
• Wafer size: 3” – 8” (Si, GaAs, Sapphire, SiC, etc)
• MAC OS, user friendly interface
• 3 wafer loading stations (each station can run multiple size wafers)
• Chamber pump: Edwards or Varian dry scroll pump
• Load lock pump: Edwards or Varian dry scroll pump
• Dedicated UPS system for emergency power back up
• Power: 120V-220VAC, 1PH, 50/60HZ
Our turnkey offering includes the following:
• Guaranteed to be in full compliance with original new tool specifications
• Full acceptance testing prior to shipment
• Installation, start up, & training at customer's facility worldwide
• Warranty options: 3, 6, or 12 months
• Unlimited support by email and phone calls
Comments:
Re-engineered by GCE as the most versatile CD-SEM solution in the market !
With focus and commitment to long term service and spare parts support, GCE has successfully deployed more than 50 systems worldwide.
Why GCE ? Click here for more information
Parts Available For KLA-Tencor 8100 CD-SEM
-
Available -
tell a friend -
print
Related Equipment For Sale
This product is located at our USA - East Coast HQ facility.